Part 1: Introduction and Overview 1. Overview and Evolution of Silicon Wafer Cleaning Technology 2. Overview of Wafer Contamination and Defectivity Part 2: Wet-Chemical Processes 3. Particle Deposition and Adhesion 4. Aqueous Cleaning and Surface Conditioning Processes Part 3: Dry Cleaning Processes 5. Gas-phase Wafer Cleaning Technology 6. Plasma Stripping and Cleaning 7. Cryogenic Aerosols and Supercritical Fluid Cleaning Part 4: Analytical and Control Aspects 8. Detection and Measurement of Particulate Contaminants 9. Surface Chemical Composition and Morphology 10. Ultratrace Impurity and Surface Morphology Analysis ukryj opis